2019 | 반도체디스플레이기술학회지 |
플라즈마 정보인자를 활용한 SiO2 식각 깊이 가상 계측 모델의 특성 인자 역할 분석
| 1106 |
2019 | Plasma Physics and Controlled Fusion |
Application of of PI-VM for management of the metal target plasma etching processes in OLED display manufacturing
| 1113 |
2019 | Journal of Periodontal & Implant Science |
The bactericidal effect of an atmospheric-pressure plasma jet on Porphyromonas gingivalis biofilms on sandblasted and acid-etched titanium discs
| 1115 |
2019 | Plasma Processes and Polymers |
Cause Analysis of the Faults in HARC Etching Processes by Using the PI-VM Model for OLED Display Manufacturing
| 1311 |
2019 | 반도체디스플레이기술학회지 |
할로겐 플라즈마에 의한 Ge2Sb2Te5 식각 데미지 연구
| 6800 |
2018 | IEEE Transactions on Semiconductor Manufacturing |
Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables
| 28205 |
2017 | Physics of Plasmas |
Bullet-to-streamer transition on the liquid surface of a plasma jet in atmospheric pressure
| 1180 |
2017 | International Journal of Refractory Metals & Hard Materials |
Fabrication of sintered tungsten by spark plasma sintering and investigation of thermal stability
| 2968 |
2017 | Plasma Sources Science and Technology |
Ion-neutral collision effect on ion-ion two-stream-instability near sheath-presheath boundary in two-ion-species plasmas
| 3426 |
2017 | Nuclear Fusion |
Enhancement of deuterium retention in damaged tungsten by plasma induced defect clustering
| 3524 |
2017 | Journal of Physics D: Applied Physics |
Optical Diagnostics for Highly-populated Tail of Electron Energy Distribution Function in Very-High-Frequency Capacitively Coupled Plasma Using Spin- and Dipole-forbidden Lines
| 3835 |
2016 | Journal of the Korean Physical Society |
Observation of Oversaturation-Induced Defect Formation in Tungsten Irradiated by Low Energy Deuterium Ion
| 947 |
2016 | Metals and Materials International |
High-Temperature Thermo-Mechanical Behavior of Functionally Graded Materials Produced by Plasma Sprayed Coating: Experimental and Modeling Results
| 1120 |
2016 | Journal of the Korean Physical Society |
Effects of Metastable Species in Helium and Argon Atmospheric Pressure Plasma Jets (APPJs) on Inactivation of Periodontopathogenic Bacteria
| 1815 |
2016 | Science of Advanced Materials |
Characteristics of Molybdenum as a Plasma-Generating Electrode
| 1865 |