Plasma Information Based Virtual Metrology (PI-VM) for Nitride Thickness in Multi-Layer PECVD
2017.11.06 14:07
학회명 | American Vacuum Society |
---|---|
연도 | 2017 |
수상자 | Hyun-Joon Roh |
상명 | John Coburn and Harold Winters Student Award |
AVS 64th International Symposium & Exhibition
John Coburn and Harold Winters Student Award in Plasma Science and Technology
관련 기사 링크(http://eng.snu.ac.kr/node/15187)