유한오름시간을 갖는 음전위 펄스에서 시변환 플라즈마 덮개의 거동연구
2008.01.03 10:39
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Journal of the Korean Vacuum Society ||1999||8(3)||||361||367||김곤호, 김영우, 김건우, 한승희, 홍문표||||It w as observed mat the time--dependent sheath w hich was f ormed around the pIanar tû get
biased by negatively voItage pulse w i th a f inite rise time in the pIasma source ion implantation. Resul ts
show that the time-dependent sheath consisted of two pû ts: the ion man ix sheath deveIOPInent during
the pulse r ise time and the dynamic sheath motion af ter attaini ng the hl Il puIse. T he ion matrix sheath
deveIOPInent which is in propor tion to square root of the pulse time and the pulse r ise rate over the
plasma densi ty but independent of me i on mass- The dynamic sheath propag ates with approximately me
ion sound speed.
biased by negatively voItage pulse w i th a f inite rise time in the pIasma source ion implantation. Resul ts
show that the time-dependent sheath consisted of two pû ts: the ion man ix sheath deveIOPInent during
the pulse r ise time and the dynamic sheath motion af ter attaini ng the hl Il puIse. T he ion matrix sheath
deveIOPInent which is in propor tion to square root of the pulse time and the pulse r ise rate over the
plasma densi ty but independent of me i on mass- The dynamic sheath propag ates with approximately me
ion sound speed.