SNU Plasma Application Laboratory

누구

Name	Kim, Gon Ho
Affiliation	Professor, Department of Energy Systems Engineering(Nuclear Engineering) College of Engineering, Seoul National University
Educational Background	Ph.D in University of Wisconsin, 1993
Telephone	+82-2-880-7468
E-mail	ghkim@snu.ac.kr
Research Topic	Plasma Engineering

Ph.D.

Ph.D. Candidate

Name	권지원(Kwon, Ji-Won)
Research Topic	플라즈마 광진단
E-mail	anakin1229@snu.ac.kr

Name	이명건(Lee, Myeong-Geon)
Research Topic	열플라즈마 대면재 연구
E-mail	lmg1142@snu.ac.kr

Name	박태준(Park, Taejun)
Research Topic	RF 플라즈마 sheath 내 이온 거동 연구
E-mail	ptj9874@snu.ac.kr

Name	배남재(Bae, Namjae)
Research Topic	펄스 플라즈마 실시간 진단
E-mail	baenj2002@snu.ac.kr

Name	이하늘(Lee, Haneul)
Research Topic	ICP heating 응용, 플라즈마 산포 해석, 플라즈마 광진단
E-mail	haneul7475@snu.ac.kr

Name	박지훈(Park, Jihoon)
Research Topic	플라즈마 광진단, AI
E-mail	wlgnstlsqkf@snu.ac.kr

Name	이인규(Lee, Ingyu)
Research Topic	반도체 공정 플라즈마 제어
E-mail	dusemong@snu.ac.kr

MS. Candidate

Name	임재민(Lim, Jaemin)
Research Topic	ICP 회로 모델, 플라즈마 탐침 진단
E-mail	yjm8385@snu.ac.kr

Alumni

Ph.D

Name	조정현 (Ph.D.)
Thesis	Structural Deformation of Carbon Nanotubes by Plasma Particle Interaction
Affiliation	삼성전자 생산기술연구소

Name	최재명 (Ph.D.)
Thesis	Dynamics of Recovering Sheath and Presheath in a Colisionless Plasma
Affiliation	삼성전자 반도체연구소

Name	이석환 (Ph.D.)
Thesis	Effect of Elastic Collision and Asymmetric Sheaths on Standing Wave Property in Capacitively Coupled Pasma
Affiliation	LAM Research Korea Ltd.

Name	김현수 (Ph.D.)
Thesis	Surface Damage Mechanism of Tungsten by Heat Flux and Deuterium Ion Irradiation in Nuclear Fusion
Affiliation	삼성전자 반도체연구소

Name	박설혜 (Ph.D.)
Thesis	Development of Plasma Information Based Virtual Metrology (PI-VM) for Plasma-assisted Processes
Affiliation	삼성디스플레이 연구소

Name	임선택 (Ph.D.)
Thesis	Investigation of Deuterium Plasma Property Variation by Carbon Impurity from Graphite
Affiliation	삼성전자 반도체연구소

Name	최명선 (Ph.D.)
Thesis	Development of Equivalent Circuit Model for Very High Frequency Driven Capacitively Coupled Plasmas
Affiliation	삼성전자 생산기술연구소

Name	허성렬 (Ph.D.)
Thesis	Characteristics of Hydrogen Negative Ion Production depending on Electron Energy Distributions in Inductively Coupled Plasmas
Affiliation	한국원자력연구원

Name	윤성영 (Ph.D.)
Thesis	Generation Mechanism of Hydroxyl Radical in Electrolyte Streamer Discharge
Affiliation	국가핵융합연구소 플라즈마기술연구센터

Name	진영길 (Ph.D.)
Thesis	Development of Hydrogen Retention Model Based on Plasma-Tungsten Interaction Analysis
Affiliation	삼성디스플레이 연구소

Name	노현준 (Ph.D.)
Thesis	Development of Plasma Information Based Virtual Metrology (PI-VM) for Drifting Deposition Process
Affiliation	삼성전자 반도체연구소

Name	김남균 (Ph.D.)
Thesis	Investigation of Generalized Bohm Sheath Criterion for Collisional, Magnetized and RF Plasmas
Affiliation	삼성전자 생산기술연구소

Name	이진영 (Ph.D.)
Thesis	Plasma Information-Virtual Metrology(PI-VM) on Interlayer Formation of Plasma-Enhanced Atomic Layer Deposition
Affiliation	한국 기계연구원

Name	장윤창 (Ph.D.)
Thesis	Plasma Information Variables Based on Ion Dynamics in Collisional RF Sheath for Etching Profile Monitoring
Affiliation	삼성전자 메모리사업부

Name

유상원 (Ph.D.)

Thesis

Development of Plasma Information Based Advanced Process

Controller (PI-APC) for Plasma Etch Processes

Affiliation

하이닉스 선행 NAND Etch

Name

송재민 (Ph.D)

Thesis

Advanced Process Control Using Plasma Information (PI-APC) for Improving

Edge Uniformity of Capacitively Coupled Plasma

Affiliation

삼성전자 반도체연구소

Name	노기백 (Ph.D)
Thesis	Investigation of Increased Tungsten Erosion induced by Ion and Heat Irradiation from Plasma
Affiliation	하이닉스 선행 NAND Etch

MS.

Name	정수연 (MS)
Thesis	대기압 플라즈마를 이용한 식각 장치 개발
Affiliation	Samsung Electronics

Name	송상헌 (MS)
Thesis	Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching
Affiliation	Samsung Electronics

Name	우제헌 (MS)
Thesis	Algorithm for analysis of electron energy distribution function from Langmuir probe data using wavelet transform
Affiliation	삼성전자 생산기술연구소

Name	이승훈 (MS)
Thesis	Diagnostics of atmospheric pressure plasma
Affiliation	한국 기계연구원

Name	정상민 (MS)
Thesis	삼중 주파수 운전 용량 결합형 장치에서 플라즈마 광진단을 이용한 전력 의존 시각 공정 제어 연구
Affiliation	삼성전자 생산기술연구소

Name	김수정 (MS)
Thesis	Characteristics of Helium Atmospheric Pressure Plasma Bullet Propagation
Affiliation	한국 원자력 통제 기술원

Name	배병준 (MS)
Thesis	저주파 인가 대기압 유전체 격벽 헬륨 플라즈마의 방전 특성 연구
Affiliation	삼성전자 반도체연구소

Name	임성재 (MS)
Thesis	Analysis of Si-Etch Uniformity Based on RF Sheath Model in Ar/SF6 Very High Frequency Driven Capacitively Coupled Plasma Etcher
Affiliation	삼성전자 반도체연구소

Name	이현주 (MS)
Thesis	Development of PI-VM for Etch Control in Wafer Edge Region
Affiliation	삼성전자 설비기술연구소

Name	김관중 (MS)
Thesis	Development of PI-VM for Fluorocarbon Plasma in ARDE Process
Affiliation	SK 하이닉스

Name	서휘원 (MS)
Thesis	Development of a Sensor Data Driven Plasma Simulator for Ar/O2 ICP Heating Properties
Affiliation	SK 하이닉스

Introduction