Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge
2010.01.04 15:01
연도 | 2009 |
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저널명 | Journal of Korean Physical Society |
쪽 |
Electron density of kHz operated atmospheric pressure dielectric barrier
discharge (APDBD) can be estimated from the V-I phase angle measurement using
the proposed equivalent circuit model. The model consisted of the plasma
resistance, the capacitive reactance, and the system impedance corresponding to
the reactor capacitance and power line impedance. The phase difference was
determined from the gap voltage (V) and the displacement current (I) flown on
the equivalent circuit, applying to estimate the electron density in the reactor
system. Since the V-I phase difference is a function of the ratio of plasma
resistance and reactance, the spatially averaged electron density can be
analyzed. Feasibility of the monitoring method was evaluated for 1 and 20 kHz
APDBD plasmas using nitrogen gas. Obtained electron densities have a good
agreement of 1D simulation results as 105~108 cm-3 during a half cycle
period.
10.1109/TPS.2012.2234140