연도 2012 
저널명 Fusion Engineering and Design 
 

Abstract - Despite the significant importance of nuclear graphite as a promising plasma-facing component material in all thermonuclear fusion devices, its physico-chemical microstructural behavior under severe irradiation conditions was poorly understood. To provide a wide range of information and understanding about the structure change of nuclear graphite under energetic hydrogen ion irradiation, we therefore carried out a systematic study with employing various characterization tools such as scanning electron microscopy (SEM), Raman spectroscopy, X-ray diffraction (XRD), and X-ray photoemission spectroscopy (XPS). Furthermore, we suggested possible surface chemical erosion mechanism from the observed physico-chemical microstructural changes.


https://doi.org/10.1016/j.fusengdes.2012.02.065

연도 저널명 제목 조회 수
2024  Fusion Engineering and Design  Sputtering yield increase with fluence in low-energy argon plasma-tungsten interaction file 151
2024  Journal of the Korean Physical Society  Macrocrack propagation with grain growth on transient heat loaded tungsten file 185
2024  IEEE Transactions on Semiconductor Manufacturing  Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C4F8/Ar/O2 Plasma 203
2024  Physics of Plasmas  Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production file 280
2024  Current Applied Physics  Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate 362
2022  Current Applied Physics  Investigation of ion-induced etch damages on trench surface of Ge2Sb2Te5 in high density Ar/SF6 plasma 478
2022  Plasma Sources Science and Technology  Investigation of ion collision effect on electrostatic sheath formation in weakly ionized and weakly collisional plasma file 589
2022  Journal of Alloys and Compounds  Competitive roles of dislocations on blister formation in polycrystalline pure tungsten file 658
2022  Journal of the Korean Physical Society  Plasma Information-based virtual metrology (PI-VM) and mass production process control file 1038
2022  Physics of Plasma  2022 Review of Data-Driven Plasma Science file 1264
2021  Journal of the Korean Physical Society  Phenomenology-based Model Predictive Control of Electron Density in Ar/SF6 Capacitively Coupled Etch Plasma 407
2021  Current Applied Physics  Development of Model Predictive Control of Fluorine Density in SF6/O2/Ar Etch Plasma by Oxygen Flow Rate 500
2021  Atoms  Population Kinetics Modeling of Low-Temperature Argon Plasma 937
2021  반도체디스플레이기술학회지  VHF-CCP 설비에서 Ar/SF6 플라즈마 분포가 Si 식각 균일도에 미치는 영향 분석 994
2021  Materials  Development of Virtual Metrology Using Plasma Information Variables to Predict Si Etch Profile Processed by SF6/O2/Ar Capacitively Coupled Plasma 1826

Archives


XE Login