Observation of Ions’ Motion near a Multi-Ion-Species and Weakly-Magnetized Plasma Sheath
2016.08.29 11:14
학회명 | K-J Seminar |
---|---|
연도 | 2016 |
수상자 | 김남균 |
상명 | Best Poster Award |
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학회명 | 연도 | 상명 | 수상자 | 제목 |
---|---|---|---|---|
K-J Seminar | 2016 | Best Poster Award | 김남균 | Observation of Ions’ Motion near a Multi-Ion-Species and Weakly-Magnetized Plasma Sheath |
한국반도체학술대회 | 2017 | Best Poster Award | 유상원 | Development of Phenomenological Model Based RF Power - Electron Density Controller for SF6/Ar Etch Plasma |
ICMAP | 2018 | Best Poster Award | 노기백 | Enhancement of Crack through the Depth of Grain Growth on Tungsten under Transient High Heat Flux |
ICMAP | 2018 | Best Poster Award | 유상원 | Model Predictive Control of Electron Density for Ar/SF6 Etching Plasma |
1st International Fusion and Plasma Conference | 2022 | Best Poster Award | 송재민 | Plasma information based Advanced Process Controller for Plasma Etch Process |
ISSM | 2018 | Best Paper Award | 유상원 | Real-time Etch Control to Reduce First Wafer Effect in SF6/O2/Ar Plasma |