연도 2017 
저널명 Journal of Physics D: Applied Physics 
 

A novel method is proposed to determine the electron energy distribution function (EEDF) including highly-populated tail originated from by energetic beam-like electrons (> 20 eV), which often occur in the narrow gap, very-high-frequency capacitively coupled plasma (VHF-CCP). This method combines the conventional Langmuir probe analysis for representing the EEDF in low-energy regime and the line-ratio method taken from optical emission spectrum for the highly-populated tail of EEDF. Here the emission lines are chosen with considering the excitation rates which is a function of shape of cross-section of spin- and dipole-forbidden state of argon atom and EEDF at corresponding energy.  In this method, the analytical EEDF model is chosen as the composition of Maxwellian for lowenergy (bulk) electrons and J Schulze’s time-average form of shifted Maxwellian [J. Schulze et al. 2008 J. Phys. D: Appl. Phys. 41 042003] for highly-populated tail of EEDF. The variables of timeaverage form of shifted Maxwellian, the fraction and mean energy of beam-like electrons, are determined by using emission model of line-intensity ratios which describes the line-intensities as a function of EEDF. This method has an advantage for diagnostics of the time averaged EEDF having highly-populated tail, especially due to beam-like electrons originated from stochastic heating, rather than two temperature EEDF. 


Roh et al 2017 J. Phys. D: Appl. Phys. https://doi.org/10.1088/1361-6463/aa6cf8

연도 저널명 제목 조회 수
2015  Fusion Science and Technology  Characterization of Two–Radiofrequency–Driven Dual Antenna Negative Hydrogen Ion Sources 1375
2015  Fusion Science and Technology  Laser-Assisted Ha Spectroscopy for Measurement of Negative Ion Density in A Hydrogen Plasma 940
2015  Fusion Science and Technology  Analysis on Interface Diffusion-Induced Embrittlement Between Tungsten and Graphite with Reactive Diffusion Barrier Model 2240
2019  IAEA CRP report  Evaluation of tritium inventory in irradiated tungsten by atomic-scale modeling 606
1992  IEEE Transactions On Plasma Science  Double Layer-Relevant Laboratory Results 3787
2001  IEEE Transactions On Plasma Science  Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF Discharge plasmas 4189
2011  IEEE TRANSACTIONS ON PLASMA SCIENCE  Hydroxyl Radical Generation on Bubble Surface of Aqua-Plasma Discharge 7431
2014  IEEE TRANSACTIONS ON PLASMA SCIENCE  Characteristics of OH* Generation in Pin-to-Electrolyte Discharges 1140
2015  IEEE TRANSACTIONS ON PLASMA SCIENCE  Bullet Velocity Distribution of a Helium Atmospheric-Pressure Plasma Jet in Various N2/O2 Mixed Ambient Conditions 1220
2015  IEEE TRANSACTIONS ON Semiconductor Manufacturing  Enhancement of the Virtual Metrology Performance for Plasma-assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters 4199
2018  IEEE Transactions on Semiconductor Manufacturing  Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 28211
2017  International Journal of Refractory Metals & Hard Materials  Fabrication of sintered tungsten by spark plasma sintering and investigation of thermal stability 2972
2016  International Journal of Refractory Metals and Hard Materials  Improvement of mechanical property of air plasma sprayed tungsten film using pulsed electric current treatment 3191
2015  J. Phys. D: Appl. Phys.  Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method 3284
2001  Japanese journal of applied physics  Plasma Source Ion Implantation for Ultrashallow Junctions: Low Energy and High Dose Rate 4942

Archives


XE Login