Plasma Information Based Virtual Metrology (PI-VM) for Nitride Thickness in Multi-Layer PECVD
2017.11.06 14:07
학회명 | American Vacuum Society |
---|---|
연도 | 2017 |
수상자 | Hyun-Joon Roh |
상명 | John Coburn and Harold Winters Student Award |
AVS 64th International Symposium & Exhibition
John Coburn and Harold Winters Student Award in Plasma Science and Technology
관련 기사 링크(http://eng.snu.ac.kr/node/15187)
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학회명 | 연도 | 상명 | 수상자 | 제목 |
---|---|---|---|---|
ICMAP | 2018 | Best Poster Award | 노기백 | Enhancement of Crack through the Depth of Grain Growth on Tungsten under Transient High Heat Flux |
ICMAP | 2018 | Best Poster Award | 유상원 | Model Predictive Control of Electron Density for Ar/SF6 Etching Plasma |
CAFRE | 2011 | 우수발표상 | 진영길 | 핵융합로공학 선행연구센터 중간 연구결과 |
American Vacuum Society | 2017 | John Coburn and Harold Winters Student Award | Hyun-Joon Roh | Plasma Information Based Virtual Metrology (PI-VM) for Nitride Thickness in Multi-Layer PECVD |
AEC/APC Symposium Asia 2021 | 2021 | Student Award | 권지원 | Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma |
1st International Fusion and Plasma Conference | 2022 | Best Poster Award | 송재민 | Plasma information based Advanced Process Controller for Plasma Etch Process |