연도 2019 
저널명 IAEA CRP report 
volume 18, page 163 

IAEA CRP 를 통해 진행된 retention 연구에 본 연구실이 참가하여 해당 리포트가 결과로 나왔으며, 추가적인 Round robin experiment 에 대한 보고서가 금년 내로 나올 예정입니다.

자료는 아래 링크에서 다운 가능합니다.


https://www.iaea.org/publications/13560/atomic-and-plasma-material-interaction-data





연도 저널명 제목 조회 수
2002  Journal of Applied Physics  Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time 103604
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 83194
2012  JOURNAL OF APPLIED PHYSICS  Fabrication of single-walled carbon nanohorns containing iodine and cesium 37441
2018  IEEE Transactions on Semiconductor Manufacturing  Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 28201
2001  Journal of the Korean Physical Society  Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma 16347
2015  Journal of Physics D: Applied Physics  How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source 12021
2014  Applied Science and Convergence Technology  Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements 10643
2009  Journal of Korean Physical Society  Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge 10075
    유도 결합형 Ar/CH4 플라즈마를 이용한 ITO의 식각 특성에 관한 연구 file 9914
2001  Surface & Coating Technology  Measurement of sheath expansion in plasma source ion implantation 9760
2012  PLASMA SOURCES SCIENCE AND TECHNOLOGY  Characteristics of vapor coverage formation on an RF-driven metal electrode to discharge a plasma in saline solution 9616
1999  Physics of Plasma  Ion sheath expansion for a target voltage with a finite risetime 8615
2009  Journal of Korean Physical Society  Effect of Bias Frequency on the Accuracy of Floating Probe Measurements 8536
2006  한국진공학회지  PSII 펄스 시스템의 동적 플라즈마 부하 회로 모델 개발 8452
    플라즈마 이온주입 방법에 의한 질화철 제조 및 자기적 성질 file 8221

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