Predictive Control of the Plasma Processes in the OLED Display Mass Production Referring to the Discontinuity Qualifying PI-VM

2020.08.10 10:31

pal_webmaster 조회 수:3798

연도 2020 
저널명 Physics of Plasmas 
쪽 - 

Physics of Plasmas

 
Predictive Control of the Plasma Processes in the OLED Display Mass Production Referring to the Discontinuity Qualifying PI-VM
 
주저자: Seolhye Park
 
Park, Seolhye, et al., Physics of Plasmas 27.8 (2020): 083507.
 
이 게시물을
목록
목록
연도 저널명 제목 조회 수
2000  Applied physics letters  Influence of Electrode-Size Effects on Plasma Sheath Expansion 7300
2014  Applied Science and Convergence Technology  Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements 10702
2021  Atoms  Population Kinetics Modeling of Low-Temperature Argon Plasma 679
2010  Carbon  Mechanism of cone-shaped carbon nanotube bundle formation by plasma treatment 6825
2006  Contributions to Plasma Physics  In-Situ Method of Monitoring Argon Plasma Density Variation Using Current and Voltage of Flat Antenna in Inductively Coupled Plasma Source 7184
2024  Current Applied Physics  Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate 108
2022  Current Applied Physics  Investigation of ion-induced etch damages on trench surface of Ge2Sb2Te5 in high density Ar/SF6 plasma 283
2021  Current Applied Physics  Development of Model Predictive Control of Fluorine Density in SF6/O2/Ar Etch Plasma by Oxygen Flow Rate 451
2019  Current Applied Physics  Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth 637
2013  Current Applied Physics  Driving frequency dependency of gas species in the bubble formation for aqua plasma generation 2302
2015  Current Applied Physics  Determination of electron energy probability function in low-temperature plasmas from current - voltage characteristics of two Langmuir probes filtered by Savitzky-Golay and Blackman window methods 3790
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 83230
2014  Fusion Engineering and Design  Preliminary test results on tungsten tile with castellation structures in KSTAR 3918
2012  Fusion Engineering and Design  Influence of H+ ion irradiation on the surface and microstructural changes of a nuclear graphite 5360
2016  Fusion Engineering and Design  Deuterium ion irradiation induced blister formation and destruction 5558
쓰기...
태그

Archives

XE Login