연도 2020 
저널명 Physics of Plasmas 

Physics of Plasmas

 
Predictive Control of the Plasma Processes in the OLED Display Mass Production Referring to the Discontinuity Qualifying PI-VM
 
주저자: Seolhye Park
 
Park, Seolhye, et al., Physics of Plasmas 27.8 (2020): 083507.
 
연도 저널명 제목 조회 수
2002  Journal of Applied Physics  Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time 103682
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 83211
2012  JOURNAL OF APPLIED PHYSICS  Fabrication of single-walled carbon nanohorns containing iodine and cesium 40311
2018  IEEE Transactions on Semiconductor Manufacturing  Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 28202
2001  Journal of the Korean Physical Society  Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma 16360
2015  Journal of Physics D: Applied Physics  How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source 12022
2014  Applied Science and Convergence Technology  Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements 10653
2009  Journal of Korean Physical Society  Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge 10075
    유도 결합형 Ar/CH4 플라즈마를 이용한 ITO의 식각 특성에 관한 연구 file 9922
2001  Surface & Coating Technology  Measurement of sheath expansion in plasma source ion implantation 9760
2012  PLASMA SOURCES SCIENCE AND TECHNOLOGY  Characteristics of vapor coverage formation on an RF-driven metal electrode to discharge a plasma in saline solution 9616
1999  Physics of Plasma  Ion sheath expansion for a target voltage with a finite risetime 8615
2009  Journal of Korean Physical Society  Effect of Bias Frequency on the Accuracy of Floating Probe Measurements 8537
2006  한국진공학회지  PSII 펄스 시스템의 동적 플라즈마 부하 회로 모델 개발 8453
2010  Thin Solid Films  Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition 8222

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