Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma
2021.11.16 20:18
학회명 | AEC/APC Symposium Asia 2021 |
---|---|
연도 | 2021 |
수상자 | 권지원 |
상명 | Student Award |
AEC/APC Symposium Asia 2021 Student Award