Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma
2021.11.16 20:18
| 학회명 | AEC/APC Symposium Asia 2021 |
|---|---|
| 연도 | 2021 |
| 수상자 | 권지원 |
| 상명 | Student Award |
AEC/APC Symposium Asia 2021 Student Award
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| 학회명 | 연도 | 상명 | 수상자 | 제목 |
|---|---|---|---|---|
| K-J Seminar | 2016 | Best Poster Award | 김남균 |
Observation of Ions’ Motion near a Multi-Ion-Species and Weakly-Magnetized Plasma Sheath
 |
| KAPRA | 2013 | 최우수 포스터상 | 김곤호 외 |
자기탐침을 이용한 대면적 고주파 축전결합형 플라즈마원에서 정상파 효과 측정
|
| 한국반도체디스플레이기술학회 | 2018 | 우수논문상 | 권지원 | Development of Second Positive System based N2 Collisional Radiative Model |
| AEC/APC Symposium Asia 2021 | 2021 | Student Award | 권지원 |
Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma
|
| American Vacuum Society | 2017 | John Coburn and Harold Winters Student Award | Hyun-Joon Roh |
Plasma Information Based Virtual Metrology (PI-VM) for Nitride Thickness in Multi-Layer PECVD
|
| ICOPS | 2015 | Outstanding Student Award | Hyun-Joon Roh |
Improvement of Dynamic Range of Electron Energy Probability Function from Two Asymmetrical Collecting Area Probe Data Filtered by Savitzky-Golay and Blackman Window Methods
|