| K-J Seminar | 2016 | Best Poster Award | 김남균 |
Observation of Ions’ Motion near a Multi-Ion-Species and Weakly-Magnetized Plasma Sheath
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| 한국반도체학술대회 | 2017 | Best Poster Award | 유상원 |
Development of Phenomenological Model Based RF Power - Electron Density Controller for SF6/Ar Etch Plasma
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| ICMAP | 2018 | Best Poster Award | 노기백 |
Enhancement of Crack through the Depth of Grain Growth on Tungsten under Transient High Heat Flux
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| ICMAP | 2018 | Best Poster Award | 유상원 |
Model Predictive Control of Electron Density for Ar/SF6 Etching Plasma
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| 1st International Fusion and Plasma Conference | 2022 | Best Poster Award | 송재민 |
Plasma information based Advanced Process Controller for Plasma Etch Process
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| ISSM | 2018 | Best Paper Award | 유상원 |
Real-time Etch Control to Reduce First Wafer Effect in SF6/O2/Ar Plasma
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