| ICMAP | 2018 | Best Poster Award | 노기백 |
Enhancement of Crack through the Depth of Grain Growth on Tungsten under Transient High Heat Flux
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| ICMAP | 2018 | Best Poster Award | 유상원 |
Model Predictive Control of Electron Density for Ar/SF6 Etching Plasma
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| CAFRE | 2011 | 우수발표상 | 진영길 |
핵융합로공학 선행연구센터 중간 연구결과
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| American Vacuum Society | 2017 | John Coburn and Harold Winters Student Award | Hyun-Joon Roh |
Plasma Information Based Virtual Metrology (PI-VM) for Nitride Thickness in Multi-Layer PECVD
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| AEC/APC Symposium Asia 2021 | 2021 | Student Award | 권지원 |
Development of Si Etch Profile Virtual Metrology using Plasma Information(PI-VM) in SF6/O2/Ar Capacitively Coupled Plasma
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| 1st International Fusion and Plasma Conference | 2022 | Best Poster Award | 송재민 |
Plasma information based Advanced Process Controller for Plasma Etch Process
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