연도 저널명 제목 조회 수
1999  Physics of Plasma  Ion sheath expansion for a target voltage with a finite risetime 8615
2012  PLASMA SOURCES SCIENCE AND TECHNOLOGY  Characteristics of vapor coverage formation on an RF-driven metal electrode to discharge a plasma in saline solution 9616
2001  Surface & Coating Technology  Measurement of sheath expansion in plasma source ion implantation 9761
    유도 결합형 Ar/CH4 플라즈마를 이용한 ITO의 식각 특성에 관한 연구 file 9923
2009  Journal of Korean Physical Society  Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge 10078
2014  Applied Science and Convergence Technology  Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements 10696
2015  Journal of Physics D: Applied Physics  How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source 12026
2001  Journal of the Korean Physical Society  Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma 16371
2018  IEEE Transactions on Semiconductor Manufacturing  Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 28206
2012  JOURNAL OF APPLIED PHYSICS  Fabrication of single-walled carbon nanohorns containing iodine and cesium 41222
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 83224
2002  Journal of Applied Physics  Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time 103732

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