연도 | 저널명 | 제목 | 조회 수 |
---|---|---|---|
2022 | Journal of the Korean Physical Society | Plasma Information-based virtual metrology (PI-VM) and mass production process control | 691 |
2022 | Physics of Plasma | 2022 Review of Data-Driven Plasma Science | 817 |
2024 | Current Applied Physics | Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate | 97 |