| 2006 | Journal Of The Korean Physical Society |
Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models
| 5697 |
| 2006 | Transactions on Electrical and Electronic Materials |
SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge
| 6051 |
| 2006 | Journal of the Korean Physical Society |
Capacitance Between an Atmospheric Discharge Plasma and the Dielectric Electrode in the Parallel Cell Reactor
| 6536 |
| 2006 | Contributions to Plasma Physics |
In-Situ Method of Monitoring Argon Plasma Density Variation Using Current and Voltage of Flat Antenna in Inductively Coupled Plasma Source
| 7184 |
| 2006 | Journal of the Korean Physical Society |
Optimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process
| 7306 |
| 2006 | 한국진공학회지 |
PSII 펄스 시스템의 동적 플라즈마 부하 회로 모델 개발
| 8453 |
| 2007 | Physics of Plasmas |
Variation of plasma parameters on boundary conditions in an inductively coupled plasma source for hyperthermal neutral beam generation
| 5176 |
| 2008 | Review of Scientific Instruments |
Self-consistent circuit model for plasma source ion implantation
| 6104 |
| 2009 | Journal of Applied Physics |
Plasma uniformity and phase-controlled etching in a very high frequency capacitive discharge
| 5746 |
| 2009 | Journal of the Korean Physical Society |
A New Langmuir Probe Analysis Algorithm Based on Wavelet Transforms to Obtain the Electron Energy Distribution Function of a Bi-Maxwellian Plasma
| 6003 |
| 2009 | Journal of Vacuum Science & Technology |
Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor
| 6388 |
| 2009 | Journal of Korean Physical Society |
Effect of Bias Frequency on the Accuracy of Floating Probe Measurements
| 8537 |
| 2009 | Journal of Korean Physical Society |
Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge
| 10076 |
| 2010 | Carbon |
Mechanism of cone-shaped carbon nanotube bundle formation by plasma treatment
| 6820 |
| 2010 | Thin Solid Films |
Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition
| 8222 |
