Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method

2014.12.22 09:27

진영길 조회 수:3275

연도 2015 
저널명 J. Phys. D: Appl. Phys. 
쪽  
Abstract
A new floating harmonics method is developed to determine the electron energy distribution shape in the non-Maxwellian plasmas. The slope and curvature of the electron energy probability function (EEPF) at the floating potential can be obtained by measuring amplitude ratios among the first three sideband harmonics of the probe electron current. Together with the generalized EEPF formula, the EEPF shapes of the non-Maxwellian plasmas are able to be determined from the slope and curvature. Here, the new method is experimentally verified and its results are compared with EEPF measurements using the Langmuir probe (LP) method. The effective electron temperature and the EEPF shape parameter obtained by the method give good agreements with those of the LP measurements.

doi:10.1088/0022-3727/48/2/022001

http://iopscience.iop.org/article/10.1088/0022-3727/48/2/022001/meta
이 게시물을
목록
목록
연도 저널명 제목 조회 수
2016  International Journal of Refractory Metals and Hard Materials  Improvement of mechanical property of air plasma sprayed tungsten film using pulsed electric current treatment 3184
2016  반도체디스플레이기술학회지  헬륨 대기압 유전체 격벽 방전기의 타운젠트–글로우 방전 모드 전이 연구 3582
2016  Fusion Engineering and Design  Deuterium ion irradiation induced blister formation and destruction 5556
2015  Journal of Nuclear Materials  Investigation of SOL plasma interaction with graphite PFC 865
2015  Fusion Science and Technology  Laser-Assisted Ha Spectroscopy for Measurement of Negative Ion Density in A Hydrogen Plasma 935
2015  Physics of Plasmas  Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions 1006
2015  IEEE TRANSACTIONS ON PLASMA SCIENCE  Bullet Velocity Distribution of a Helium Atmospheric-Pressure Plasma Jet in Various N2/O2 Mixed Ambient Conditions 1210
2015  Journal of Nuclear Materials  Recrystallization of Bulk and Plasma-Coated Tungsten with Accumulated Thermal Energy Relevant to Type-I ELM in ITER H-Mode Operation 1240
2015  Fusion Science and Technology  Characterization of Two–Radiofrequency–Driven Dual Antenna Negative Hydrogen Ion Sources 1360
2015  Fusion Science and Technology  Analysis on Interface Diffusion-Induced Embrittlement Between Tungsten and Graphite with Reactive Diffusion Barrier Model 2230
2015  J. Phys. D: Appl. Phys.  Determination of electron energy distribution function shape for non-Maxwellian plasmas using floating harmonics method 3275
2015  Current Applied Physics  Determination of electron energy probability function in low-temperature plasmas from current - voltage characteristics of two Langmuir probes filtered by Savitzky-Golay and Blackman window methods 3788
2015  IEEE TRANSACTIONS ON Semiconductor Manufacturing  Enhancement of the Virtual Metrology Performance for Plasma-assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters 4190
2015  Journal of Physics D: Applied Physics  How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source 12022
2014  Journal of Nuclear Materials  Investigation of SOL plasma interaction with graphite PFC 902
쓰기...
태그

Archives

XE Login