연도 저널명 제목 조회 수
2010  Thin Solid Films  Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition 8132
1998  Physics of Plasmas  Azimuthally Symmetric Pseudosurface and Helicon Wave Propagation in an Inductively Coupled Plasma at Low Magnetic Field 7625
    플라즈마내 입자의 하전 특성에 관한 연구 file 7496
2011  IEEE TRANSACTIONS ON PLASMA SCIENCE  Hydroxyl Radical Generation on Bubble Surface of Aqua-Plasma Discharge 7399
2006  Journal of the Korean Physical Society  Optimum Operating Frequency of an Atmospheric-Pressure Dielectric-Barrier Discharge for the Photo-Resistor Ashing Process 7306
2000  Applied physics letters  Influence of Electrode-Size Effects on Plasma Sheath Expansion 7298
2006  Contributions to Plasma Physics  In-Situ Method of Monitoring Argon Plasma Density Variation Using Current and Voltage of Flat Antenna in Inductively Coupled Plasma Source 7183
2001  Surface & Coating Technology  The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation 7059
1997  Surface & Coating Technology  Polymer Surface Modification by Plasma Source Ion Implantation 6958
2010  Carbon  Mechanism of cone-shaped carbon nanotube bundle formation by plasma treatment 6819
2019  반도체디스플레이기술학회지  할로겐 플라즈마에 의한 Ge2Sb2Te5 식각 데미지 연구 6771
2006  Journal of the Korean Physical Society  Capacitance Between an Atmospheric Discharge Plasma and the Dielectric Electrode in the Parallel Cell Reactor 6535
2009  Journal of Vacuum Science & Technology  Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor 6373
2004  Key Engineering Materials  Measurement of Monodisperse Particle Charge in DC Plasma 6273
2014  Journal of Physics D: Applied Physics  Standing wave effect on plasma distribution in an inductively coupled plasma source with a short antenna 6215

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