2008 | Review of Scientific Instruments |
Self-consistent circuit model for plasma source ion implantation
| 6104 |
2006 | Transactions on Electrical and Electronic Materials |
SF6 and O2 Effects on PR Ashing in N2 Atmospheric Dielectric Barrier Discharge
| 6051 |
2009 | Journal of the Korean Physical Society |
A New Langmuir Probe Analysis Algorithm Based on Wavelet Transforms to Obtain the Electron Energy Distribution Function of a Bi-Maxwellian Plasma
| 6002 |
2000 | Plasma sources science & technology |
Asymmetric plasma potential fluctuation in an inductive plasma source
| 6002 |
1995 | Physics of Plasmas |
Magnetic and Collisional Effects on Presheaths
| 5964 |
| |
3-5mm 강판절단용 아크 플라즈마 절단기 팁 개발
| 5919 |
2009 | Journal of Applied Physics |
Plasma uniformity and phase-controlled etching in a very high frequency capacitive discharge
| 5746 |
2006 | Journal Of The Korean Physical Society |
Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models
| 5697 |
2001 | Journal of applied physics |
Electrostatic probe diagnostic of a planar type radio-frequency inductively coupled oxgen plasma
| 5650 |
2016 | Fusion Engineering and Design |
Deuterium ion irradiation induced blister formation and destruction
| 5552 |
1993 | Journal of Vacuum Science & Technology |
Role of contaminants in electron cyclotron resonance plasmas
| 5385 |
2002 | Surface and Coatings Technology |
The effect of plasma exposure and annealing atmosphere on shallow junction formation using plasma source ion implantation
| 5364 |
2012 | Fusion Engineering and Design |
Influence of H+ ion irradiation on the surface and microstructural changes of a nuclear graphite
| 5330 |
2000 | REVIEW OF SCIENTIFIC INSTRUMENTS |
Effect of harmonic rf fields on the emissive probe characteristics
| 5324 |
1995 | Journal of applied physics |
A Two-Dimensional Particle-In-Cell Simulation of an Electron-Cyclotron-Resonance Etching Tool
| 5308 |