| 1993 | Journal of Vacuum Science & Technology |
Etching Rate Characterization of SiO2 and Si Using In Energy Flux and Atomic Fluorine Density in a CF4/O2/Ar Electron Cyclotron Resonance Plasma
| 5290 |
| 2007 | Physics of Plasmas |
Variation of plasma parameters on boundary conditions in an inductively coupled plasma source for hyperthermal neutral beam generation
| 5176 |
| 2013 | Journal of Applied Physics |
Low-energy D+ and H+ ion irradiation effects on highly oriented pyrolytic graphite
| 4983 |
| 2001 | Japanese journal of applied physics |
Plasma Source Ion Implantation for Ultrashallow Junctions: Low Energy and High Dose Rate
| 4941 |
| 2012 | Journal of the Korean Physical Society |
Field Emission Characteristics of Cone-shaped Carbon-nanotube Bundles Fabricated Using an Oxygen Plasma
| 4937 |
| 2000 | Plasma sources science & technology |
Design and operation of an Omegatron mass spectrometer for measurements of positive and negative ion species in electron cyclotron resonance plasmas
| 4869 |
| 1999 | Journal of aerosol science |
Charge measurement on monodisperse particles in a DC glow discharge plasma
| 4650 |
| 1992 | Plasma Sources Science & Technology |
Measurements of the presheath in an electron cyclotron resonance etching device
| 4630 |
| 1993 | Journal of Vacuum Science & Technology |
Two-Dimensional Mapping of Plasma Parameters Using Probes in an Electron Cyclotron Resonance Etching Device
| 4601 |
| 2006 | Japanese Journal of Applied Physics |
Investigation of Current on the Conducting Target Biased with a Large Negative Potential in the Non-Uniform Plasma
| 4536 |
| 2004 | Surface and Coatings Technology |
Time-resolved plasma measurement in a high-power pulsed ICP source for large area
| 4509 |
| | |
정전 탐침을 이용한 유도 결합형 반응기에서 발생하는 산소 플라즈마의 특성연구
 | 4472 |
| | |
The operation properties of DBD reactors in air pressure with varying the capacitance of reactors
| 4457 |
| 2006 | Japanese Journal of Applied Physics |
Etching of Multi-Walled Carbon Nanotubes Using Energetic Plasma Ions
| 4305 |
| | |
유한오름시간을 갖는 음전위 펄스에서 시변환 플라즈마 덮개의 거동연구
| 4286 |
