Double Layer-Relevant Laboratory Results
2007.12.31 14:48
연도 | 1992 |
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저널명 | IEEE Transactions On Plasma Science |
쪽 |
Many double-layer-relevant laboratory experiments have been carried out at the University of Wisconsin. Laboratory stair-step double layers, which resemble three or more weak double layers joined in series, have been produced without ionization. Double-layer floating potential fluctuations have been investigated and progress has been made in developing a novel technique for measuring electron energy distribution functions in low-density double layers (i.e. λD≫probe dimensions). A new inductive plasma source has been developed. With this source, magnetized double layers can be routinely produced. These magnetized double layers are often weak stair-step double layers that are oblique to the magnetic field. Laboratory data of emitting probe characteristics taken in tenuous plasmas have helped to quantify space-charge-enhanced plasma gradient induced error in double-layer electric field measurements made by satellite double probes. Also, magnetic sheaths have been experimentally studied and compared with theory
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연도 | 저널명 | 제목 | 조회 수 |
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1993 | Journal of Vacuum Science & Technology | Etching Rate Characterization of SiO2 and Si Using In Energy Flux and Atomic Fluorine Density in a CF4/O2/Ar Electron Cyclotron Resonance Plasma | 5290 |
1992 | Plasma Sources Science & Technology | Measurements of the presheath in an electron cyclotron resonance etching device | 4630 |
1992 | IEEE Transactions On Plasma Science | Double Layer-Relevant Laboratory Results | 3780 |