연도 1993 
저널명 Review of scientific instruments 
 

Plasma flow velocity was determined experimentally from the time delay between fluctuations measured by two spatially separated Langmuir probes in both subsonic and supersonic, steady‐state, unmagnetized plasma flows.  


http://dx.doi.org/10.1063/1.1144471

연도 저널명 제목 조회 수
2024  Current Applied Physics  Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate 117
2022  Current Applied Physics  Investigation of ion-induced etch damages on trench surface of Ge2Sb2Te5 in high density Ar/SF6 plasma 292
2021  Journal of the Korean Physical Society  Phenomenology-based Model Predictive Control of Electron Density in Ar/SF6 Capacitively Coupled Etch Plasma 332
2022  Plasma Sources Science and Technology  Investigation of ion collision effect on electrostatic sheath formation in weakly ionized and weakly collisional plasma file 432
2021  Current Applied Physics  Development of Model Predictive Control of Fluorine Density in SF6/O2/Ar Etch Plasma by Oxygen Flow Rate 454
2022  Journal of Alloys and Compounds  Competitive roles of dislocations on blister formation in polycrystalline pure tungsten file 454
2019  IAEA CRP report  Evaluation of tritium inventory in irradiated tungsten by atomic-scale modeling 606
2019  Current Applied Physics  Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth 639
2021  Atoms  Population Kinetics Modeling of Low-Temperature Argon Plasma 682
2022  Journal of the Korean Physical Society  Plasma Information-based virtual metrology (PI-VM) and mass production process control file 710
2022  Physics of Plasma  2022 Review of Data-Driven Plasma Science file 832
2021  반도체디스플레이기술학회지  VHF-CCP 설비에서 Ar/SF6 플라즈마 분포가 Si 식각 균일도에 미치는 영향 분석 848
2015  Journal of Nuclear Materials  Investigation of SOL plasma interaction with graphite PFC 877
2014  Journal of Nuclear Materials  Investigation of SOL plasma interaction with graphite PFC 907
2015  Fusion Science and Technology  Laser-Assisted Ha Spectroscopy for Measurement of Negative Ion Density in A Hydrogen Plasma 939

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