New features of the emissive probe characteristic curves in an inductive plasma source were observed in the E mode operation. More than the two inflection points in the derivative of the I–V characteristic curves are found when the harmonics of the input frequency (13.56 MHz) are present. The pairs of inflection points are symmetric about dc plasma potential. © 2000 American Institute of Physics.

http://dx.doi.org/10.1063/1.1150214