연도 2004 
저널명 Key Engineering Materials 
 

 The experiments are carried out in the system consists of a monodisperse particle generator, a DC magnetized plasma generation system, and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 9.6G is applied to the plasma zone by external magnetic coil. Previous work showed tha the charging effect clearly increases with increasing the size of the particle and plasma density, as one expected. The result showed that AL2O3 particles in the size ranges of 30nm to 150nm where the number of charge varied fron 20 to 45 elementary charges at the chamber pressure of 1.17 torr. If the magnetic field is applied at the chamger, Al2O3 particle of 50nm in diameter showed that the charge varied from ca. 15 elementary charges to 75 charges as the magnetic field changed from 0 to 9.6G.


10.4028/www.scientific.net/KEM.270-273.855


연도 저널명 제목 조회 수
2002  Journal of Applied Physics  Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time 103800
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 83235
2012  JOURNAL OF APPLIED PHYSICS  Fabrication of single-walled carbon nanohorns containing iodine and cesium 41852
2018  IEEE Transactions on Semiconductor Manufacturing  Development of the Virtual Metrology for the Nitride Thickness in Multi-Layer Plasma-Enhanced Chemical Vapor Deposition Using Plasma-Information Variables 28211
2001  Journal of the Korean Physical Society  Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma 16381
2015  Journal of Physics D: Applied Physics  How to determine the relative ion concentrations of multiple-ion-species plasmas generated in the multi-dipole filament source 12035
2014  Applied Science and Convergence Technology  Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements 10704
2009  Journal of Korean Physical Society  Electron Density Monitoring By Using the V-I Phase Difference with a Circuit Model for a kHz Atmospheric-Pressure Dielectric Barrier Discharge 10088
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2001  Surface & Coating Technology  Measurement of sheath expansion in plasma source ion implantation 9767
2012  PLASMA SOURCES SCIENCE AND TECHNOLOGY  Characteristics of vapor coverage formation on an RF-driven metal electrode to discharge a plasma in saline solution 9622
1999  Physics of Plasma  Ion sheath expansion for a target voltage with a finite risetime 8619
2009  Journal of Korean Physical Society  Effect of Bias Frequency on the Accuracy of Floating Probe Measurements 8551
2006  한국진공학회지  PSII 펄스 시스템의 동적 플라즈마 부하 회로 모델 개발 8454
2010  Thin Solid Films  Effects of argon and oxygen flow rate on water vapor barrier properties of silicon oxide coatings deposited on polyethylene terephthalate by plasma enhanced chemical vapor deposition 8235

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