Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions
2015.03.13 09:24
| 연도 | 2015 |
|---|---|
| 저널명 | Physics of Plasmas |
| 쪽 |
Abstract
A global model was developed to investigate the densities of negative ions and the other species in
a low-pressure inductively coupled hydrogen plasma with a bi-Maxwellian electron energy
distribution. Compared to a Maxwellian plasma, bi-Maxwellian plasmas have higher populations
of low-energy electrons and highly vibrationally excited hydrogen molecules that are generated
efficiently by high-energy electrons. This leads to a higher reaction rate of the dissociative electron
attachment responsible for negative ion production. The model indicated that the bi-Maxwellian
electron energy distribution at low pressures is favorable for the creation of negative ions. In addition,
the electron temperature, electron density, and negative ion density calculated using the model
were compared with the experimental data. In the low-pressure regime, the model results of the bi-
Maxwellian electron energy distributions agreed well quantitatively with the experimental measurements,
unlike those of the assumed Maxwellian electron energy distributions that had discrepancies.