| 2015 | IEEE TRANSACTIONS ON Semiconductor Manufacturing |
Enhancement of the Virtual Metrology Performance for Plasma-assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters
| 4581 |
| 2015 | Fusion Science and Technology |
Characterization of Two–Radiofrequency–Driven Dual Antenna Negative Hydrogen Ion Sources
| 1797 |
| 2015 | Journal of Nuclear Materials |
Investigation of SOL plasma interaction with graphite PFC
| 1151 |
| 2015 | Fusion Science and Technology |
Laser-Assisted Ha Spectroscopy for Measurement of Negative Ion Density in A Hydrogen Plasma
| 1568 |
| 2015 | Fusion Science and Technology |
Analysis on Interface Diffusion-Induced Embrittlement Between Tungsten and Graphite with Reactive Diffusion Barrier Model
| 2959 |
| 2015 | Journal of Nuclear Materials |
Recrystallization of Bulk and Plasma-Coated Tungsten with Accumulated Thermal Energy Relevant to Type-I ELM in ITER H-Mode Operation
| 2872 |
| 2015 | Current Applied Physics |
Determination of electron energy probability function in low-temperature plasmas from current - voltage characteristics of two Langmuir probes filtered by Savitzky-Golay and Blackman window methods
| 4387 |
| 2014 | Journal of Physics D: Applied Physics |
Standing wave effect on plasma distribution in an inductively coupled plasma source with a short antenna
| 6537 |
| 2014 | Fusion Engineering and Design |
Preliminary test results on tungsten tile with castellation structures in KSTAR
| 5573 |
| 2014 | Journal of the Korean Physical Society |
Characteristics of a Non-Maxwellian Electron Energy Distribution in a Low-pressure Argon Plasma
| 2203 |
| 2014 | 반도체디스플레이기술학회지 |
이중 주파수 전원의 용량성 결합 플라즈마 식각장비에서 전극하전에 의한 입사이온 에너지분포 변화연구
| 1680 |
| 2014 | Applied Science and Convergence Technology |
Monitoring Ion Energy Distribution in Capacitively Coupled Plasmas Using Non-invasive Radio-Frequency Voltage Measurements
| 14167 |
| 2014 | IEEE TRANSACTIONS ON PLASMA SCIENCE |
Characteristics of OH* Generation in Pin-to-Electrolyte Discharges
| 1333 |
| 2014 | Journal of Nuclear Materials |
Investigation of SOL plasma interaction with graphite PFC
| 1182 |
| 2014 | 반도체디스플레이기술학회지 |
좁은 간격 CCP 전원의 전극과 측면 벽 사이 플라즈마 분포
| 2111 |
