연도 저널명 제목 조회 수
2004  Key Engineering Materials  Measurement of Monodisperse Particle Charge in DC Plasma 6545
2002  Surface and Coatings Technology  The effect of plasma exposure and annealing atmosphere on shallow junction formation using plasma source ion implantation 5613
2002  Journal of Applied Physics  Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time 111764
2001  IEEE Transactions On Plasma Science  Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF Discharge plasmas 4409
2001  Japanese journal of applied physics  Plasma Source Ion Implantation for Ultrashallow Junctions: Low Energy and High Dose Rate 5077
2001  Journal of applied physics  Electrostatic probe diagnostic of a planar type radio-frequency inductively coupled oxgen plasma 6018
2001  Surface & Coating Technology  The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation 7177
2001  Surface & Coating Technology  Measurement of sheath expansion in plasma source ion implantation 10110
2001  Journal of the Korean Physical Society  Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma 16632
2001  Current Applied Physics  Calculation of transport parameters in KT-1 tokamak edge plasma 84102
2000  Plasma sources science & technology  Design and operation of an Omegatron mass spectrometer for measurements of positive and negative ion species in electron cyclotron resonance plasmas 5101
2000  REVIEW OF SCIENTIFIC INSTRUMENTS  Effect of harmonic rf fields on the emissive probe characteristics 5599
2000  Plasma sources science & technology  Asymmetric plasma potential fluctuation in an inductive plasma source 6335
2000  Applied physics letters  Influence of Electrode-Size Effects on Plasma Sheath Expansion 7414
1999  Journal of aerosol science  Charge measurement on monodisperse particles in a DC glow discharge plasma 4822

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