| 2004 | Surface and Coatings Technology |
Time-resolved plasma measurement in a high-power pulsed ICP source for large area
| 5297 |
| 2002 | Surface and Coatings Technology |
The effect of plasma exposure and annealing atmosphere on shallow junction formation using plasma source ion implantation
| 5885 |
| 2002 | Journal of Applied Physics |
Measurement of expanding plasma sheath from a target baised by a negative pulse with a fast rise time
| 112824 |
| 2001 | Journal of applied physics |
Electrostatic probe diagnostic of a planar type radio-frequency inductively coupled oxgen plasma
| 6189 |
| 2001 | IEEE Transactions On Plasma Science |
Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF Discharge plasmas
| 4582 |
| 2001 | Japanese journal of applied physics |
Plasma Source Ion Implantation for Ultrashallow Junctions: Low Energy and High Dose Rate
| 5295 |
| 2001 | Surface & Coating Technology |
The measurement of nitrogen ion species ratio in the inductively coupled plasma source ion implantation
| 7316 |
| 2001 | Surface & Coating Technology |
Measurement of sheath expansion in plasma source ion implantation
| 10329 |
| 2001 | Journal of the Korean Physical Society |
Characterization of Oxygen Plasma by Using the Langmuir Probe in an Inductively Coupled Plasma
| 16973 |
| 2001 | Current Applied Physics |
Calculation of transport parameters in KT-1 tokamak edge plasma
| 87404 |
| 2000 | Plasma sources science & technology |
Asymmetric plasma potential fluctuation in an inductive plasma source
| 6517 |
| 2000 | REVIEW OF SCIENTIFIC INSTRUMENTS |
Effect of harmonic rf fields on the emissive probe characteristics
| 8749 |
| 2000 | Plasma sources science & technology |
Design and operation of an Omegatron mass spectrometer for measurements of positive and negative ion species in electron cyclotron resonance plasmas
| 5357 |
| 2000 | Applied physics letters |
Influence of Electrode-Size Effects on Plasma Sheath Expansion
| 7594 |
| 1999 | Journal of aerosol science |
Charge measurement on monodisperse particles in a DC glow discharge plasma
| 10173 |
