Direct Measurement of Plasma Flow Velocity Using a Langmuir Probe

2007.12.31 14:54

최명선 조회 수:4438

연도	1993
저널명	Review of scientific instruments
쪽

Plasma flow velocity was determined experimentally from the time delay between fluctuations measured by two spatially separated Langmuir probes in both subsonic and supersonic, steady‐state, unmagnetized plasma flows.

http://dx.doi.org/10.1063/1.1144471

이 게시물을

연도	저널명	제목	조회 수
1999	Physics of Plasma	Ion sheath expansion for a target voltage with a finite risetime	8862
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1997	Surface & Coating Technology	Polymer Surface Modification by Plasma Source Ion Implantation	8128
1995	Journal of applied physics	A Two-Dimensional Particle-In-Cell Simulation of an Electron-Cyclotron-Resonance Etching Tool	5892
1995	Physics of Plasmas	Magnetic and Collisional Effects on Presheaths	6351
1993	Review of scientific instruments	Direct Measurement of Plasma Flow Velocity Using a Langmuir Probe	4438
1993	Journal of Vacuum Science & Technology	Role of contaminants in electron cyclotron resonance plasmas	5695
1993	Journal of Vacuum Science & Technology	Two-Dimensional Mapping of Plasma Parameters Using Probes in an Electron Cyclotron Resonance Etching Device	4874
1993	Journal of Vacuum Science & Technology	Etching Rate Characterization of SiO2 and Si Using In Energy Flux and Atomic Fluorine Density in a CF4/O2/Ar Electron Cyclotron Resonance Plasma	5736
1992	Plasma Sources Science & Technology	Measurements of the presheath in an electron cyclotron resonance etching device	4982
1992	IEEE Transactions On Plasma Science	Double Layer-Relevant Laboratory Results	4362

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Direct Measurement of Plasma Flow Velocity Using a Langmuir Probe

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