Publications
2024 Current Applied Physics Analysis of electron thermal properties in Ar/O2 inductively coupled plasmas: A global model simulation using Langmuir probe data
2024 Physics of Plasmas Micro-range uniformity control of the etching profile in the OLED display mass production referring to the PI-VM model
2024 Plasma Physics and Controlled Fusion Data-driven plasma science based plasma etching process design in OLED mass production referring to PI-VM
2024 IEEE Transactions on Semiconductor Manufacturing Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C4F8/Ar/O2 Plasma
2024 Fusion Engineering and Design Sputtering yield increase with fluence in low-energy argon plasma-tungsten interaction
2024 Journal of the Korean Physical Society Macrocrack propagation with grain growth on transient heat loaded tungsten
2024 Physics of Plasmas Plasma heating characterization of the large area inductively coupled plasma etchers with the plasma information for managing the mass production
2024 Current Applied Physics Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate
2022 Current Applied Physics Investigation of ion-induced etch damages on trench surface of Ge2Sb2Te5 in high density Ar/SF6 plasma
2022 Journal of the Korean Physical Society Plasma Information-based virtual metrology (PI-VM) and mass production process control
Q & A
PEALD 챔버 세정법 2025-03-11 14:29 이상원
RF BIAS REDLECT POWER HUNTING 문제 1 2025-02-19 09:50 김성필
RF ROD 연결부 부하로 인한 SHUNT, SERIES 열화 2 file 2025-01-21 22:23 박현수
HF와 LF중 LF REFLECT POWER가 커지는 현상에 대해서 도움이 필요합니다. 2 2024-12-31 13:56 박민석
III-V 반도체 에칭 공정 문의 1 2024-10-28 12:44 이원용
CCP 장비 하부 전극 dc 펄스 전력 1 2024-10-26 23:18 정구민
DC Arc Plasma Torch 관련 문의 1 2024-10-22 10:22 이진솔
Wafer 영역별 E/R 차이에 대한 질문 [Gas flow system vs E/R] 1 2024-10-16 13:24 안지훈
동일한 RF방전챔버에서 화학종별 이온화율에 대한 질문 1 2024-10-11 21:29 김도연
ESC 사용 공정에서 Dummy Wafer Chuck Force 에 대해서 궁급합니다 1 2024-09-18 10:39 서아리

Phone: +82-2-880-8971 Fax: +82-2-889-2688 Webmaster: wlgnstlsqkf@snu.ac.kr

Plasma Application Laboratory, building 30, room 102, 1, Gwanak-ro, Gwanak-gu, Seoul, Republic of Korea

Department of Energy System Engineering (Nuclear Engineering), Seoul National University



Links

XE Login